June 27, 2022 to July 1, 2022
Online
Europe/Amsterdam timezone
For more information on this conference, please visit: https://epsplasma2022.eu

Structure and Mechanical Properties of TaN and Ta2O5 Coatings Prepared by Sputtering Using Non-Self-Maintained gas discharge

P1a.304
Not scheduled
1h
Online

Online

Contributed Poster Low Temperature and Dusty Plasmas Mon - Poster Session 1

Speaker

Anton Taran (V. N. Karazin Kharkiv National University, Ukraine)
Name A.V. Taran
Affiliation NSC Kharkov Institute of Physics and Technology, Institute of Plasma Physics
Oral or poster Poster

Primary author

Anton Taran (V. N. Karazin Kharkiv National University, Ukraine)

Presentation materials