48th EPS Conference on Plasma Physics

Name: 48th EPS Conference on Plasma Physics
Start: 2022-06-27T09:00:00+02:00
End: 2022-07-01T19:00:00+02:00
Location: Online

27 June 2022 to 1 July 2022

Online

Europe/Amsterdam timezone

For more information on this conference, please visit: https://epsplasma2022.eu

Particle charging by EUV and EUV-induced plasma

O4.301

30 Jun 2022, 11:40

15m

Online

Contributed Oral Low Temperature and Dusty Plasmas Thu - LTDP (Plasma-Gas Conversion)

Mark van de Kerkhof (ASML)

Mark van de Kerkhof (ASML)

EPS_Abstract_Particle_Charging.pdf

epspaper_charging_2022_updated_v2.pdf