48th EPS Conference on Plasma Physics

Name: 48th EPS Conference on Plasma Physics
Start: 2022-06-27T09:00:00+02:00
End: 2022-07-01T19:00:00+02:00
Location: Online

June 27, 2022 to July 1, 2022

Online

Europe/Amsterdam timezone

For more information on this conference, please visit: https://epsplasma2022.eu

Particle charging by EUV and EUV-induced plasma

O4.301

Jun 30, 2022, 11:40 AM

15m

Online

Contributed Oral Low Temperature and Dusty Plasmas Thu - LTDP (Plasma-Gas Conversion)

Mark van de Kerkhof (ASML)

Mark van de Kerkhof (ASML)

EPS_Abstract_Particle_Charging.pdf

epspaper_charging_2022_updated_v2.pdf